Monochlorosilane (SiH3Cl)
SiH3Cl (MCS) is a precursor material used in the manufacturing of semiconductors and display panels.
SPECIFICATION
Unit : %
SPECIFICATION : SiH3Cl, N2, SiH4, SiH2Cl2, SiHCl3, SiCl4, HCl
| SiH3Cl |
N2 |
SiH4 |
SiH2Cl2 |
SiHCl3 |
SiCl4 |
HCl |
| 98.0 |
0.1 |
1.5 |
0.1 |
0.1 |
0.1 |
0.1 |
SPECIFICATION : SiH3Cl, SPECIFICATIO
| SiH3Cl |
98.0 |
| N2 |
0.1 |
| SiH4 |
1.5 |
| SiH2Cl2 |
0.1 |
| SiHCl3 |
0.1 |
| SiCl4 |
0.1 |
| HCl |
0.1 |
CYLINDERS INFORMATION
CYLINDERS INFORMATION : TYPE, MATERIAL, FILLING WEIGHT, VALVE CONNECTION TYPE
| TYPE |
MATERIAL |
FILLING WEIGHT |
VALVE CONNECTION TYPE |
| 47L |
Mn Steel, Cr-Mo Steel |
26 kg |
CGA/DISS636 etc. |
CYLINDERS INFORMATION : 47L, SPECIFICATIO
| TYPE |
47L |
| MATERIAL |
Mn Steel, Cr-Mo Steel |
| FILLING WEIGHT |
26 kg |
| VALVE CONNECTION TYPE |
CGA/DISS636 etc. |
