Other High-Purity Gases
In addition to manufacturing value-added items that are increasingly
in demand due to the expansion of 3D NAND and microfabrication processes,
SK specialty offers various services to its customers, such as sourcing, refinement, and mixing.
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HeliumHe
Helium is an inert gas used across industries as a carrier gas, purge gas, cooling gas, tracer gas for leak detection, or entertaining gas.
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KryptonKr
Kr is used as a momentum gas in the etching of deep holes in 3D NAND of semiconductors.
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XenonXe
It is a noble gas used in the etching process during the semiconductor manufacturing, which is classified as rare gas as a trace element contained in the air.
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Silicon tetrachlorideSTC,SiCl4
It is used as a raw material for cleaning the residual Flourine in the chamber, etching, and manufacturing Silica.
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Silicon tetrafluorideSiF4
It is a gas used in plasma etching and ion implantation processes of semiconductors.
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PhosphinePH3
It is a gas used in the ion implantation process of semiconductors.
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ArsineAsH3
It is a gas used in the ion implantation process of semiconductors.
